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High-Purity Alumina Ceramic Targets from China Suppliers | Premium Quality Factory for Advanced Manufacturing Applications

Alumina ceramic targets are high-purity sputtering targets composed of alumina (Al₂O₃, with a purity level typically ≥99.9%). These targets are produced using advanced powder metallurgy and high-temperature sintering techniques, making them ideal for physical vapor deposition (PVD) processes such as magnetron sputtering and pulsed laser deposition. As a leading manufacturer in China, our factory ensures that these alumina targets possess exceptional insulating properties, chemical inertness, high hardness, and outstanding optical performance. These features make them essential in various applications, including semiconductor insulation layers, optical coatings, and wear-resistant protection. We are proud suppliers of high-quality alumina ceramic targets, supporting industries that demand reliability and performance

    Film properties
    High insulation

    The prepared alumina film has extremely high resistivity (>10¹⁴ Ω·cm) and dielectric strength (~10 MV/cm), making it an ideal material for insulation and dielectric layers.

    High hardness and wear resistance

    The extremely high hardness of the film (9 on the Mohs scale, second only to diamond) can significantly enhance the scratch and wear resistance of the device surface.

    Excellent chemical stability

    Extremely resistant to most acids, alkalis, and solvents, with excellent corrosion resistance and stability at high temperatures.

    Sputtering and Film Formation Properties
    High Purity and Consistency

    Ultra-high purity (≥99.9%) and strict composition control ensure stable film performance and avoid electrical or optical defects caused by impurity introduction.

    Dense and uniform film formation

    High target density (≥3.6 g/cm³) and uniform grain size enable high-quality film deposition with low defects and good thickness uniformity (inhomogeneity ≤5%).

    Process stability

    The ceramic structure is stable, not prone to cracking or powder loss during long-term sputtering, and has a long service life.

    Compatibility of Chemistry and Technology
    Excellent thermal stability

    The melting point is extremely high (2054°C), and the prepared films can work in high-temperature environments without degradation.

    Wide Gas Compatibility

    Sputtering in inert gas (Ar), reactive gas (O₂), or mixed gas environments with a wide process window.

    Good Adhesion

    Good adhesion to a wide range of substrates (silicon wafers, glass, metals, etc.) and can be used as a functional or protective layer.

    Frequently Asked Questions
    Q: What are the insulation properties of the prepared alumina film?
    The prepared alumina film features extremely high resistivity (>10¹⁴ Ω·cm) and a dielectric strength of approximately 10 MV/cm, making it an excellent option for insulation and dielectric layers.
    Q: How durable and scratch-resistant is the alumina film?
    The film has an extremely high hardness rating of 9 on the Mohs scale, which is second only to diamond. This allows it to significantly boost the scratch and wear resistance of device surfaces.
    Q: How does the purity of the target material affect the film quality?
    With an ultra-high purity level of ≥99.9% and strict composition control, it ensures stable performance and prevents electrical or optical defects caused by impurities.
    Q: What is the thermal stability limits of the alumina film?
    The film has an extremely high melting point of 2054°C, allowing it to perform stably in high-temperature environments without experiencing degradation.
    Q: Which substrates can the alumina film adhere to?
    It shows excellent adhesion to a wide range of substrates, including silicon wafers, glass, and various metals, rendering it ideal for functional or protective applications.