High-purity tungsten target 300mm W Target

Tungsten target shape: plane target special-shaped customization

Tungsten target purity: 3N5

Tungsten target size: processed according to drawings or customized by others

The tungsten powder is placed in a vacuum jacket and sealed, and a degassing tube is drawn from the sleeve to vacuum (the vacuum degree is at least 2*10 -3Pa).

At the same time, the vacuum sleeve is heated at the same time, and the heating is carried out until the temperature reaches 450 °C ~ 500 °C, and the heat preservation time is 3 ~ 4 hours.

After the heat preservation is completed, take out the sleeve and hold the air while continuing to maintain its internal vacuum (that is, the closed air tube is closed, so that a closed vacuum environment is formed inside the sleeve).

The sealed air sleeve is placed in a hot isostatic pressing (HIP) furnace for hot isostatic pressing process for sintering (hot isostatic pressing process parameters are temperature 1300°C ~ 1400°C, ambient pressure 180Mpa ~ 200Mpa, and kept warm at this temperature pressure for 4 hours ~ 6 hours).

After the sintering is completed, the tungsten target is cooled and the vacuum sleeve is removed.

After coating and sintering, the tungsten target has the characteristics of 99% density or even higher, the diameter of the average transparent texture is 100um or even smaller, the oxygen content is 20ppm or less, and the deflection angle is about 500Mpa. The sintered tungsten target has a high density, a high level of transparent frame that cannot be achieved by conventional compression sintering methods, and a significant improvement in the deflection angle, resulting in a significant reduction in particulate matter.