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High-purity tungsten target 300mm W Target

W alloy target materials are made from high-purity tungsten (W) combined with other metals such as titanium and titanium-tungsten alloys to create sputtering targets, specifically designed for physical vapor deposition (PVD) processes such as magnetron sputtering. Their high melting point, excellent thermal stability, and good conductivity make them vital for applications in fields such as semiconductor integrated circuits, high-temperature coatings, advanced displays, and new energy.

    characteristics

    Superb film formation quality and stability

    The formed film has extremely high thermal stability and chemical inertness, is resistant to high-temperature oxidation, and can operate at temperatures exceeding 1000°C;

    The film layer is dense and uniform, with strong adhesion, compatible with various substrates (such as silicon, glass, ceramics, etc.), and not prone to peeling;

    Having low resistivity and good thermal conductivity, making it suitable for high-power and high-frequency electronic devices.

    Efficient coating process performance

    The sputtering rate is high, the process reproducibility is good, and the target material utilization rate is high, making it suitable for large-scale continuous production;

    The grain size is small and uniform (usually controlled between 10–40μm), with low surface roughness and few defects;

    Exhibits good stability and deposition consistency in processes such as DC magnetron sputtering and HiPIMS.

    Wide range of environmental and process adaptability

    Acid and corrosion resistance, stable performance in most wet and plasma processes;

    Supports low-temperature deposition (can be below 200°C), suitable for heat-sensitive functional devices and flexible substrates;

    Compatible with lithography processes (such as lithography, etching, CMP) to meet the multi-step integration needs of semiconductor manufacturing.

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    Application

    Semiconductors and Microelectronics

    Barrier and adhesion layers: Diffusion barriers (e.g., W/TiW alloys) in copper interconnect technology to prevent copper migration.

    Gate and contact hole filling: Used as local interconnect and contact hole materials in advanced logic and memory chips.

    High Temperature and Protective Coatings

    High-temperature component protection: Anti-corrosion and oxidation coatings for high-temperature components such as aero engines and gas turbine blades.

    Tool and Die Strengthening: Surface coating of cutting tools and die-casting molds significantly improves wear resistance and service life.

    Display and Optical Devices

    Thin-Film Transistor (TFT) Electrodes: Gates and signal lines used in high-resolution LCD/OLED display panels.

    X-ray targets and optical masks: as high-energy ray blocking and pattern transfer layers in medical imaging and lithography systems.

    New Energy and Sensors

    Photovoltaic cell electrodes: the back electrode and transparent conductive layer of thin-film solar cells (such as CIGS cells).

    MEMS and sensor structural layer: Used for conductive and structural films in micromechanical systems such as pressure sensors and accelerometers.

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    W target

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