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High-Purity 300mm Cr Target for Precision Applications
Characteristics
Film properties
Strong adhesion: The chromium film has a strong bond with glass, metal, and polymer substrates, making it an ideal adhesion layer material.
Hardness and wear resistance: The film hardness can reach 800-1000 HV, which significantly improves the scratch resistance of the device surface.
Corrosion resistance: stable in humid, salt spray and acidic environments, widely used in protective coatings;
Efficient sputtering performance
High sputtering rate: high density (≥7.2 g/cm³) and low oxygen content (≤500 ppm) improve the deposition efficiency;
Uniform and dense film formation: the grain size is small (≤30μm), and the film thickness is unevenly distributed ≤5%, which is suitable for coating large substrates;
Low particle defects: ultra-high purity (≥99.95%) reduces particulate contamination during sputtering.
Compatibility of Chemistry and Technology
Oxidation resistance: forms a dense Cr₂O₃ passivation layer in the air to protect the underlying material;
Low-temperature deposition capacity: can form a film at a low temperature of ≤150°C, compatible with heat-sensitive substrates such as plastics;
Excellent etching characteristics: high selectivity with photoresist etching, simple graphic process;
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Application
Semiconductor and display technology
Metallized layer: used as a diffusion barrier layer for copper interconnection (such as Cu/Cr stack) to inhibit copper atom migration;
Display panel: gate/signal line coating in TFT-LCD to improve conductivity and adhesion;
Photomask: Chromium film is used as the light-blocking layer of the photoresist mask, and the graphic accuracy reaches the sub-micron level.
Functional and Protective Coatings
Wear-resistant coating: Cr plating on the surface of tools and molds to extend the service life (such as injection molds, cutting tools);
Anti-corrosion plating: surface protection of auto parts and ship parts, replacing traditional electroplating chrome;
Aerospace: High temperature oxidation resistant coating for engine components (operating temperature ≤ 700°C);
Optics and decoration
Optical coating: the bottom layer of the anti-reflective film of camera lenses and AR lenses (to enhance the adhesion of the film layer);
Decorative plating: surface decoration of jewelry and bathroom hardware (matte chrome, bright chrome and other diversified effects);
Solar cells: back electrode materials for thin-film solar cells (such as CIGS cells);
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