Reliable 300mm WSi Target for Enhanced Performance

After mixing tungsten powder and silicon powder, pressing is carried out, and then hot pressing and sintering is carried out to obtain a tungsten-silicon alloy target material; wherein, the pressing comprises a first pressing and gradient ultrasonic pressing in sequence; the pressure and the ultrasonic power increase synchronously in the gradient ultrasonic pressing. The preparation method provided by the present invention has significantly improved the performance of the obtained tungsten silicon alloy target by means of a specific pressing process, and the compactness of the obtained tungsten silicon target has a relative density greater than or equal to more than 99%, and the problem of powder loss caused by insufficient alloying of tungsten silicon alloy target has been avoided in the use process.

Our targets are known in the industry for their superior purity, density, and smaller grain size. These superior properties help create a stronger, denser, and smoother coating on the substrate, guaranteeing you an efficient, durable, and reliable product experience. On the raw material side, we only use high-quality raw materials, and strictly ensure the standardization of the use of raw materials; on the production side, our employees have decades of production experience, very well understand how to manufacture high-quality target products; at the quality inspection end, the standardized quality inspection process and professional precision equipment allow any defects of the product to be found and dealt with, to ensure that the products you get are flawless.