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Silicon Carbide: The Future of High-Performance Materials

Silicon carbide (SiC) is a structural ceramic material with excellent properties. Silicon carbide parts, that is, equipment parts with silicon carbide and its composite materials as the main materials, have the characteristics of high density, high thermal conductivity, high bending strength, large elastic modulus, etc., and can adapt to the harsh reaction environment of strong corrosiveness and ultra-high temperature in wafer epitaxy, etching and other manufacturing links, so it is widely used in major semiconductor equipment such as epitaxial growth equipment, etching equipment, oxidation/diffusion/annealing equipment.

    Key Points Of Process Operation

    Silicon carbide carrier disksrb

    1. Clean the work site, and the equipment operator starts the mechanical equipment for raw material processing and mixing according to the "Equipment Operation Regulations";

    2. According to the technician to inform the material in turn, if you find sundries (bricks, stones, iron filings, mud, etc.) in the processing of materials, you should pick them out in time, and do not mix them into the material;

    3. The crushing particle size of raw materials should meet the particle size specified in the process requirements;

    4. The humidity of raw materials for crushing and mixing should be kept appropriate (4%~6%);

    5. The processed and crushed materials should be classified and stored to prevent cross-contamination and confusion;

    6. Strictly according to the "Ingredient Notice" issued by the technician for batching, before batching by the squad leader to confirm and sign, the weighing portions, data to inform the weigher, and record on the blackboard;

    7. After receiving the batching weighing data, the weigher corrects the zero position of the platform scale, and weighs it after confirming that it is correct, and the batching weighing error shall not exceed 3‰;

    8. The weigher should subtract the material that exceeds the weighing error in time, and notify the relevant personnel in time to deal with the missymmetrical material;

    9. After weighing, the weigher sends a signal to the mixer operator;

    10. The mixer operator starts to time from the end of the material, and the mixing time is 2 minutes each time;

    11. Magnetic separation is carried out before the crushing of petroleum coke and after the mixing of raw materials, and the magnetic materials are sent to the designated place for processing;

    12. The weigher cleans the dust and blanking materials in the platform scale tool holder in time;

    13. Place the materials in the weighing cylinder clean before getting off work every day;

    14. After the batching of each shift is completed, the batching data (the number of ingredients, etc.) will be recorded truthfully and accurately;

    15. The squad leader is responsible for contacting the metrology officer to verify / calibrate the scale once a month;

    16. The equipment operator shall maintain and maintain the equipment according to the "Equipment Maintenance, Maintenance and Overhaul Regulations", clean the work site and recycle the tools.

    Performance Table

    Silicon carbide

    Application

    1. Silicon carbide (SiC) is a covalent compound with excellent physical and chemical properties, widely used in high-tech fields such as aerospace, semiconductors, new energy, national defense, chemical machinery, photovoltaics, nuclear energy, automotive, and electronics.

    2. Based on the crystal structure, silicon carbide can be divided into: α-SiC and β-SiC; according to different preparation processes, silicon carbide can be divided into: RBSiC, SSiC, RSiC, HP SiC, HIP SiC, CVD SiC etc.

    3. Taking semiconductor integrated circuits as an example, the development of the third-generation silicon carbide semiconductors, as well as the increasing demand for precision ceramic components in semiconductor chip manufacturing equipment such as photolithography machines, etchers, and oxidation diffusion furnaces, further promotes the development of silicon carbide materials and preparation technologies.

    characteristics of silicon carbide

    1. High hardness, with a Vickers hardness of 2500-2800HV, it possesses extremely high wear resistance.

    2. Good chemical stability, it does not easily react with most chemicals at high temperatures.

    3. Excellent oxidation resistance, forming a dense layer of silicon dioxide at high temperatures.

    4. High thermal conductivity, with the thermal conductivity of high-purity sintered SiC being approximately 240-260 W/m·K.

    Advantages Of Silicon Carbide Parts

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