Boron Carbide target：special for PVD

Boron carbide ceramic targets are sputtering targets made from high-purity boron carbide powder that has been sintered using advanced techniques, specifically designed for physical vapor deposition (PVD) processes, such as magnetron sputtering. As a representative of superhard ceramic materials, they possess extremely high hardness, excellent wear resistance, and significant neutron absorption capabilities, making them crucial in key applications across the nuclear industry, ultra-hard protective coatings, and precision tools.

property

Film properties

Boron carbide thin films can achieve a hardness of 30-40 GPa (approximately 3000-4000 HV), making it one of the hardest known materials, significantly enhancing the wear resistance and scratch resistance of device surfaces. It exhibits extremely high corrosion resistance against acids and bases, particularly maintaining good chemical inertness at high temperatures. The material has a low density (approximately 2.52 g/cm³), but an extremely high Young's modulus, making it suitable for lightweight protective applications where weight sensitivity is important.

High-efficiency sputtering performance

High-density (≥98% theoretical density) targets are obtained through hot pressing (HP) or hot isostatic pressing (HIP), which reduce particle splatter and cracking during the sputtering process. Although the conductivity is relatively poor (requiring RF radio frequency sputtering), the process is mature and can yield uniform thin films with good adhesion.

Special functional characteristics

The element boron has a high thermal neutron absorption cross-section (600 barns), making it an ideal choice for control rods in nuclear reactors and shielding materials. With a melting point of up to 2450°C, it maintains structural stability and performance in high-temperature environments. Its low coefficient of thermal expansion allows it to withstand drastic temperature changes without cracking.

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Application

Nuclear Industry and Radiation Protection

Neutron absorbing layer: Used for the coating of control rods, shielding components and other key components of nuclear reactors, effectively absorbing thermal neutrons and ensuring nuclear safety.

Protective cladding: Provides neutron protection coatings for nuclear fuel or nuclear waste storage facilities.

Super hard and wear-resistant protective coating

Tool Coating: Coated on the surface of cutting tools, drills, and molds (such as drawing dies), significantly improving their wear life and machining accuracy.

Key component protection: Used in aero engine components, gas turbine blades, bearings, etc., providing high-temperature wear resistance and anti-corrosion protection.

Special Functions and Research and Development Field

Semiconductor process components: Used for coating wearing parts such as nozzles and fixtures in semiconductor etching processes, taking advantage of their resistance to plasma erosion and low pollution.

Thermoelectric materials: High-purity B₄C is a promising high-temperature thermoelectric conversion material for energy harvesting and sensors.

Cutting-edge research and development: Research as a key material in cutting-edge fields such as quantum technology and superhard composite films.

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