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Alumina target：applied for multiple cutting-edge manufacturing fields
Film properties
High insulation: The prepared alumina film has extremely high resistivity (>10¹⁴ Ω·cm) and dielectric strength (~10 MV/cm), making it an ideal material for insulation and dielectric layers.
High hardness and wear resistance: The extremely high hardness of the film (9 on the Mohs scale, second only to diamond) can significantly enhance the scratch and wear resistance of the device surface.
Excellent chemical stability: Extremely resistant to most acids, alkalis, and solvents, with excellent corrosion resistance and stability at high temperatures.
Sputtering and Film Formation Properties
High Purity and Consistency: Ultra-high purity (≥99.9%) and strict composition control ensure stable film performance and avoid electrical or optical defects caused by impurity introduction.
Dense and uniform film formation: High target density (≥3.6 g/cm³) and uniform grain size enable high-quality film deposition with low defects and good thickness uniformity (inhomogeneity ≤5%).
Process stability: The ceramic structure is stable, not prone to cracking or powder loss during long-term sputtering, and has a long service life.
Excellent thermal stability: The melting point is extremely high (2054°C), and the prepared films can work in high-temperature environments without degradation.
Wide Gas Compatibility: Sputtering in inert gas (Ar), reactive gas (O₂), or mixed gas environments with a wide process window.
Good Adhesion: Good adhesion to a wide range of substrates (silicon wafers, glass, metals, etc.) and can be used as a functional or protective layer.
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Semiconductors and Microelectronics
Gate Dielectric Layer: Serves as a gate insulation layer for MOSFET devices or is used in high-κ media/metal gate stacking structures.
Integrated Circuit Passivation Layer: Al₂O₃ film is deposited on the chip surface to protect the internal circuit from water vapor and ionic contamination in the environment.
Film capacitor dielectric: Used to prepare high-capacity, high-stability MIM (metal-insulator-metal) capacitors.
Optics and Optoelectronics
Anti-reflective coatings: Single or multiple anti-reflective films are deposited on glasses, camera lenses, and display panels using their appropriate refractive index.
Optical Protective Layer: Applied to the surface of optical components such as laser mirrors and infrared windows as a protective film resistant to abrasions and corrosion.
Optoelectronic equipment: As a packaging barrier for OLED displays, solar cells, and other devices, it effectively blocks water and oxygen penetration and extends the life of the device.
Wear-resistant and protective coating
Tool Mold Coating: Al₂O₃ coating is deposited on the surface of cutting tools and stamping dies, greatly improving its wear resistance, thermal stability, and service life.
Aerospace and Automotive: Provides high-temperature oxidation and corrosion resistance protection for critical components such as engine components and turbine blades.
Biomedical Devices: Functional coatings for surfaces such as artificial joints, surgical tools, etc., providing abrasion, corrosion, and bio-inert surfaces.
Other cutting-edge fields
Magnetic Recording Storage: Used in hard disks as a protective layer and insulation layer for the head.
Sensor: Acts as an insulating or protective layer in MEMS sensors.
Corrosion Protection: Provides long-lasting anti-corrosion protection for metal substrates (such as stainless steel and aluminum alloys).
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