Zinc Oxide Target：excellent thin film property
Thin film properties
High transmittance and conductivity: High transmittance in the visible light range, with resistivity further reducible through doping, suitable for transparent electrodes.
Crystallinity: High-quality films with c-axis preferential orientation can be prepared, which is beneficial for piezoelectric and optoelectric performance.
Low-temperature film formation capability: Can be deposited at lower temperatures (even at room temperature), suitable for flexible substrates and temperature-sensitive devices.
Sputtering performance
High sputtering rate and stability: High density and high purity ensure a stable sputtering process with a high film formation rate.
Uniformity and consistency: Fine and uniform grains (usually ≤10μm) enable uniform film formation over large areas.
Low defects and contamination: The microstructure is dense, and fewer particles are produced during the sputtering process, which is beneficial for improving device yield.
Chemistry and Functional Diversity
Doping flexibility: The electrical properties can be regulated through doping with elements such as Al and Ga to achieve n-type conductivity.
Piezoelectric and thermoelectric properties: It has good piezoelectric coefficients and thermoelectric responses, making it suitable for sensors and energy harvesting devices.
Chemical stability: Chemically stable at room temperature, resistant to moisture and oxidation, suitable for various process environments.
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Optoelectronics and Display Technology
Transparent conductive films: Used as transparent electrodes in touch screens, liquid crystal displays (LCDs), organic light-emitting diodes (OLEDs), etc. (as a replacement for ITO).
Solar cells: Serving as window layers or buffer layers in thin-film solar cells (such as CIGS and perovskite cells).
Sensors and piezoelectric devices
Gas sensors: Sensitive response to various gases (such as H₂, NO₂, ethanol, etc.), used for environmental monitoring and safety detection.
Piezoelectric sensors and acoustic wave devices: Used in surface acoustic wave (SAW) filters and piezoelectric layers in micro-electromechanical systems (MEMS).
Semiconductor and optoelectronic devices
Ultraviolet photodetectors: Utilized for ultraviolet light detection and imaging based on their wide bandgap characteristics.
Light-emitting devices: Can be used in functional layers of ultraviolet LED and laser structures.
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